Report ID: ET-09
Tool: Etch chamber family C(익명)
Symptom: “Pressure tweak” 후 CD mean shift + edge-heavy map
Format: Designed experiment write-up. Brainstorming slide 아님.
1. Objective
Chamber pressure setpoint(±8%)가 CD shift를 설명하는지, RF hours / season kit / ESC temperature가 dominate하는지.
2. Factors(coded)
| Factor | − | + | Notes | | --- | --- | --- | --- | | A Pressure | −8% | +8% | Contested knob | | B RF hours bucket | Low | High | Same chamber | | C ESC temp | Nom | +3°C | Often ignored |
Short-loop wafer full factorial 2³; then product-like stack confirmation.
3. Results(compressed)
Main effect A(pressure) small.
Main effect B(RF hours) large.
Edge die B×C interaction visible.
Pressure narrative failed. Consumable/seasoning narrative held.
Pressure에 대한 loud opinion은 main effect 아님.
4. Confirmation lot
Nominal pressure high RF-hours chamber가 defect signature reproduce.
+8% pressure low RF-hours chamber는 did not.
Decision: pressure tribal fix freeze; RF-hour gate로 kit/season playbook trigger.
5. What we almost did wrong
- All chambers pressure “golden match”로 변경.
- No split lot.
- No coded factors.
- MES note: “optimized.”
That path는 next PM에서 서로 싸우는 tribal recipe invent.
Coded 아니면 experiment 아님—mood.
6. Actions
| Action | Owner | | --- | --- | | RF-hour threshold → auto advisory | Equipment | | Run card ESC temp logging mandatory | Process | | Pressure change ET-style DOE ID required | Process + Yield | | ET-09 maps in QMS close | Yield |
Adjacent fences
Ion-implant dose walk는 Faraday chain. Wet-bath notebook은 titration lifetime. High-NA stitching은 litho seam. AMC hunt는 airborne chemistry. ET-09는 etch rumor causal honesty. One ugly map으로 all chamber retune 마라.
Sign-off
Process ____ Equipment ____ Yield ____
Three signature 없으면 ET-09는 PDF, control 아님.