Calendar: EUV-S7 · Source / scanner couple (anonymized)
Period: 28 days
Ops claim: “Source availability 91%.”
Format: Availability calendar. Not a tin-droplet physics lecture.
Month grid (simplified)
| Week | Mon | Tue | Wed | Thu | Fri | Sat | Sun | | --- | --- | --- | --- | --- | --- | --- | --- | | W1 | G | G | A | G | R | G | G | | W2 | G | Y | G | G | G | A | G | | W3 | R | R | Y | G | G | G | A | | W4 | G | G | G | Y | G | G | G |
Legend: G = available & exposing · Y = available, dose unstable · A = available, no reticle/lot · R = down
Green on the CMMS is not green on the wafer calendar.
Where 91% lied
CMMS “available” counted Y and A as uptime.
Wafer-productive G-days were closer to 74%.
Collector swap week (W3 Mon–Tue): honest R.
Mid-week Y: source “up,” CD wandering — litho held lots while dashboard stayed green.
Calendar disciplines
- Split states: Down / Idle-no-lot / Unstable / Exposing.
- Dose / pulse stability gate before G.
- Reticle-not-ready ≠ source success.
- Publish G-hours to capacity planning, not raw available.
- Every R day gets a cause code tied to source subsystem (not “scanner”).
If idle and unstable share a color, finance will believe a fairy tale.
Adjacent fences
High-NA / stitching essays own imaging physics. Reticle custody owns mask identity. Matching scorecards own chamber gates. EUV-S7 owns whether ‘up’ meant photons on resist. Do not sell availability that cannot print.
Close
A source calendar without state colors is a mood board. EUV-S7 finally used four colors—and the 91% story ended.